GB/T 20510-2024 氧化铟锡靶材

ICS

77.150.60

CCS

H62

中华人民共和国国家标准

GB/T20510—2024

代替GB/T20510—2017

氧化铟锡靶材

Indium-tinoxidetarget

2024-09-29发布2025-04-01实施

国家市场监督管理总局

发布

国家标准化管理委员会

GB/T20510—2024

目次

前言

Ⅲ

·····································································································

1

范围

1

··································································································

2

规范性引用文件

1

······················································································

3

术语和定义

1

···························································································

4

分类

2

··································································································

5

技术要求

2

······························································································

5.1

化学成分

2

·························································································

5.2

物理性能

3

·························································································

5.3

尺寸规格及其偏差

3

···············································································

5.4

外观质量

3

·························································································

5.5

内部质量

3

·························································································

6

试验方法

3

······························································································

6.1

化学成分

3

·························································································

6.2

物理性能

3

·························································································

6.3

尺寸规格及其偏差

4

···············································································

6.4

外观质量

4

·························································································

6.5

内部质量

4

·························································································

7

检验规则

4

······························································································

7.1

检查和验收

4

······················································································

7.2

组批

4

······························································································

7.3

检验项目

4

·························································································

7.4

取样和制样

5

······················································································

7.5

检验结果的判定

6

·················································································

8

标志、包装、运输、贮存及随行文件

6

································································

8.1

标志

6

······························································································

8.2

包装

6

······························································································

8.3

运输与贮存

6

······················································································

8.4

其他

6

······························································································

8.5

随行文件

6

·························································································

9

订货单内容

7

···························································································

Ⅰ

GB/T20510—2024

前言

本文件按照GB/T1.1—2020《标准化工作导则第1部分：标准化文件的结构和起草规则》的规

定起草。

本文件代替GB/T20510—2017《氧化铟锡靶材》。与GB/T20510—2017相比，除结构调整和编

辑性改动外，主要技术变化如下：

a）更改了适用范围，将“适用于以99.99%金属铟、锡为原料生产的氧化铟锡靶材”更改为“适用

于由InO和SnO粉末按照一定比例混合，以常压烧结工艺生产的氧化铟锡靶材”（见第

232

1章，2017年版的第1章）；

b）更改了“相对密度”的定义（见3.2，2017年版的3.2）；

c）删除了“开尔文电桥”的术语和定义（见2017年版的3.3）；

d）更改了相对密度的内容（见3.2,2017年版的3.2）；

e）更改了分类方法，将按照相对密度分类方法更改为按照形状和氧化铟和氧化锡的配比分类（见

第4章,2017年版的4.1）；

f）更改了主要化学成分的要求（见5.1.1,2017年版的4.2.1）；

g）更改了物理性能的要求（见5.2，2017年版的4.3）；

h）更改了尺寸规格及其允许偏差的内容（见5.3，2017年版的4.4）；

i）更改了外观质量的要求（见5.4,2017年版的4.5）；

j）增加了内部质量的要求（见5.5）；

k）更改了化学成分分析方法（见6.1,2017年版的5.1）；

l）更改了相对密度和电阻率的检测方法（见6.2.1和6.2.2，2017年版的5.2.1和5.2.2）；

m）更改了检验项目的内容（见7.3,2017年版的6.3）。

请注意本文件的某些内容可能涉及专利。本文件的发布机构不承担识别专利的责任。

本文件由中国有色金属工业协会提出。

本文件由全国有色金属标准化技术委员会（SAC/TC243）归口。

本文件起草单位：先导电子科技股份有限公司、株洲冶炼集团股份有限公司、广西晶联光电材料有

限责任公司、芜湖映日科技股份有限公司、中山智隆新材料科技有限公司、株洲火炬安泰新材料有限公

司、深圳市中金岭南有色金属股份有限公司韶关冶炼厂、成都中建材光电材料有限公司、上海大学、

广东欧莱高新材料股份有限公司、河北恒博新材料科技股份有限公司、广东先导稀材股份有限公司、

福建阿石创新材料股份有限公司。

本文件主要起草人：朱世会、朱刘、童培云、覃雪莲、黄誓成、曾墩风、葛春桥、蒋少英、

左鸿毅、郑林、李喜峰、李鹏、李庆丰、陈文麟、余芳、朱赞芳、傅清波、黄作、王志强、李强、

刘慧明、曾平生、张建华、王慧河、骆胜磊、陈钦忠、王凯凯、张科。

本文件于2006年首次发布，2017年第一次修订，本次为第二次修订。

Ⅲ

GB/T20510—2024

氧化铟锡靶材

1范围

本文件规定了氧化铟锡靶材（以下简称ITO靶材）的分类、技术要求、试验方法、检验规则及标

志、包装、运输与贮存、随行文件和订货单内容。

本文件适用于由InO和SnO粉末按照一定比例混合，以常压烧结工艺生产的氧化铟锡靶材，是制

232

作透明导电薄膜的核心材料。

2规范性引用文件

下列文件中的内容通过文中的规范性引用而构成本文件必不可少的条款。其中，注日期的引用文

件，仅该日期对应的版本适用于本文件；不注日期的引用文件，其最新版本（包括所有的修改单）适用

于本文件。

GB/T1551硅单晶电阻率的测定直排四探针法和直流两探针法

GB/T3850致密烧结金属材料与硬质合金密度测定方法

GB/T6569精细陶瓷弯曲强度试验方法

GB/T8170数值修约规则与极限数值的表示和判定

GB/T13298金属显微组织检验方法

GB/T16535精细陶瓷线热膨胀系数试验方法顶杆法

GB/T38389氧化铟锡靶材化学分析方法

SL499钻孔应变法测量残余应力的标准测试方法

YS/T837溅射靶材﹘背板结合质量超声波检验方法

3术语和定义

下列术语和定义适用于本文件。

3.1

表观密度balkdensity

每单位体积物质的质量。

3.2

相对密度relativedensity

ITO靶材表观密度与理论密度的比值。各牌号ITO靶材的理论密度见表1。

表1各牌号ITO靶材的理论密度

理论密度

牌号

g/cm3

ITO907.155

ITO937.163

ITO957.167

1