GB/T 44221-2024 光学系统波前像差的测定 夏克-哈特曼光电测量法

ICS17.180.99

CCSL50

中华人民共和国国家标准

GB/T44221—2024

光学系统波前像差的测定

夏克⁃哈特曼光电测量法

Determinationofwavefrontaberrationinopticalsystems—

Electro⁃opticalShack⁃Hartmannmethod

2024⁃07⁃24发布2025⁃02⁃01实施

国家市场监督管理总局

国家标准化管理委员会发布

GB/T44221—2024

目次

前言··························································································································Ⅲ

1范围·······················································································································1

2规范性引用文件········································································································1

3术语和定义··············································································································1

4测量原理及方法········································································································2

4.1测量原理···········································································································2

4.2光学系统波前像差测量方法···················································································2

4.3光学零件面形偏差的测量······················································································3

5测量条件·················································································································4

5.1测量环境···········································································································4

5.2样品·················································································································4

6设备及装置··············································································································4

6.1测量仪··············································································································4

6.2辅助镜头···········································································································5

7测量步骤·················································································································5

7.1测量前准备········································································································5

7.2波前重构方法的选择····························································································6

7.3光路对准···········································································································6

7.4测量与数据的判定·······························································································6

8测量数据处理···········································································································6

9测量报告·················································································································7

附录A（资料性）波前复原方法·······················································································8

附录B（资料性）Zernike多项式序列···············································································11

附录C（资料性）测量报告····························································································13

参考文献····················································································································14

Ⅰ

GB/T44221—2024

前言

本文件按照GB/T1.1—2020《标准化工作导则第1部分：标准化文件的结构和起草规则》的规

定起草。

请注意本文件的某些内容可能涉及专利。本文件的发布机构不承担识别专利的责任。

本文件由中国科学院提出。

本文件由全国光测量标准化技术委员会（SAC/TC487）归口。

本文件起草单位：中国科学院苏州生物医学工程技术研究所、中国科学院光电技术研究所、中国标

准化研究院、中国科学院空天信息创新研究院、中国科学院长春光学精密机械与物理研究所、苏州慧利

仪器有限责任公司、中国计量科学研究院、长春奥普光电技术股份有限公司、浙江舜宇光学有限公司、

成都科奥达光电技术有限公司、苏州一光仪器有限公司、舟山市质量技术监督检测研究院。

本文件主要起草人：史国华、邢利娜、何益、杨金生、蔡建奇、王璞、刘春雨、韩森、洪宝玉、冯长有、

包明帝、叶虹、谢桂华、伍开军、沈晨雁、郝华东。

Ⅲ

GB/T44221—2024

光学系统波前像差的测定

夏克⁃哈特曼光电测量法

1范围

本文件描述了采用夏克⁃哈特曼法测量光学系统波前像差的原理及方法、测量条件、设备及装置、

测量步骤以及测量数据处理。

本文件适用于采用夏克⁃哈特曼法测量光学系统波前像差的测量，也适用于光学零件面形偏差的

测量。

2规范性引用文件

本文件没有规范性引用文件。

3术语和定义

下列术语和定义适用于本文件。

3.1

波前wavefront

光波传播时的等相位面。

[来源：GB/T13962—2009，2.28]

3.2

波前像差wavefrontaberration

Φ

波前与理想波前的偏差。

[来源：GB/T41869.2—2022，3.1，有修改]

3.3

面形偏差surfaceformdeviation

被测光学表面相对于参考光学表面的偏差。

[来源：GB/T2831—2009，3.1]

3.4

波前重构wavefrontreconstruction

通过子孔径的斜率计算得到入射波前的相位分布的过程。

3.5

口径diameter

仪器能够检测的光学零件或系统的通光孔径。

3.6

自准直法autocollimationmethod

使平行光管发出的平行光照射在试样上，再由试样反射回平行光管，根据焦点附近像的情况测定

试样的倾斜等的方法。可用于对准、调焦、测量微小位移和角度。

1