GB/T 44538-2024 碳基薄膜 椭偏光谱法测定非晶态碳基薄膜的光学性能

ICS

25.220.99

CCS

A29

中华人民共和国国家标准

GB/T44538—2024

碳基薄膜椭偏光谱法测定

非晶态碳基薄膜的光学性能

Carbonbasedfilms—Determinationofopticalpropertiesofamorphouscarbon

filmsbyspectfoscopicellipsometry

（ISO23216：2021,MOD）

2024-09-29发布2025-05-01实施

国家市场监督管理总局

发布

国家标准化管理委员会

GB/T44538—2024

目次

前言

Ⅲ

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1

范围

1

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2

规范性引用文件

1

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3

术语和定义

1

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4

试样制备

1

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5

设备

1

··································································································

5.1

卤素灯和蓝光LED灯

1

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5.2

探测器

1

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5.3

与光电倍增管（PMT）/电荷耦合器件（CCD）/光电二极管阵列（PDA）连接的光谱仪

2

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5.4

软件

2

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5.5

置物台

2

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5.6

测角仪

2

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5.7

摄像机

2

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6

试验步骤

2

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6.1

样品预处理

2

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6.2

试验准备

2

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6.3

试验条件

2

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6.4

光学模型

2

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6.5

测试过程

3

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6.6

平行试验

3

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7

试验结果分类

3

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8

试验报告

3

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附录A（规范性）

非晶碳基薄膜的光学性质分类方法

4

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Ⅰ

GB/T44538—2024

前言

本文件按照GB/T1.1—2020《标准化工作导则第1部分：标准化文件的结构和起草规则》的规

定起草。

本文件修改采用ISO23216：2021《碳基薄膜椭偏光谱法测定非晶态碳基薄膜的光学性能》。

本文件与ISO23216：2021相比做了下述结构调整：

—6.4和6.5对应ISO23216：2021中的6.4；

—6.6对应ISO23216：2021中的6.5。

本文件做了下列编辑性改动：

—增加了图1光学模型各层所对应类型的标注；

—增加了标题条（见5.1～5.7）。

请注意本文件的某些内容可能涉及专利。本文件的发布机构不承担识别专利的责任。

本文件由中国机械工业联合会提出。

本文件由全国金属与非金属覆盖层标准化技术委员会（SAC/TC57）归口。

本文件起草单位：中国机械总院集团武汉材料保护研究所有限公司、纳狮新材料有限公司、安徽纯

源镀膜科技有限公司、中国科学院深圳先进技术研究院、广东电网有限责任公司、广州今泰科技股份有

限公司。

本文件主要起草人：段海涛、贾丹、曹一莹、张心凤、沈学忠、高明、詹胜鹏、凃杰松、王彦峰、

王流火、杨田、陈辉、骆小双、尤锦鸿、易娟、苏东艺。

Ⅲ

GB/T44538—2024

碳基薄膜椭偏光谱法测定

非晶态碳基薄膜的光学性能

1范围

本文件描述了使用椭偏光谱法测定非晶碳基薄膜光学特性（折射率n和消光系数k）以及通过n﹘k图

谱进行不同类型非晶碳基薄膜分类的方法。

本文件适用于通过离子蒸镀、溅射、电弧沉积、等离子体辅助化学气相沉积、热丝等工艺沉积的非

晶碳基薄膜。

本文件不适用于通过金属或硅改性的非晶碳基薄膜，或在薄膜厚度上存在成分/性质梯度的非晶碳

基薄膜。

2规范性引用文件

本文件没有规范性引用文件。

3术语和定义

下列术语和定义适用于本文件。

3.1

折射率refractiveindex

n

电磁辐射在真空中的传播速度与在介质中的传播速度之比。

3.2

消光系数extinctioncoeicient

k

介质（物质）对电磁辐射的吸收量。

4试样制备

各基底上的非晶碳基薄膜均可用于试验，只要基底是光学各向同性的，并具有可用光学模型。推荐

的试验基底是镜面的硅晶片。镜面的硅晶片能作为非晶基碳膜的基底以满足不同的测试要求。样品应为

均匀的非晶碳基薄膜，薄膜厚度应为0.02μm~5μm。

应提供样品的所有相关细节，如尺寸、表面粗糙度、材料类型、成分、微观结构和处理过程等。

5设备

5.1卤素灯和蓝光LED灯

其光谱范围应包括450nm~950nm。

5.2探测器

用于获取椭偏仪测量数据，其光谱范围应包括450nm~950nm。

1